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Other inert gases will have different purging characteristics and may dry a system more quickly or slowly
SEMI C47-0699 (first published - replaces SEMI C7
SEMI C90-00-0725 (complete rewrite)
1 This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by providing the tools needed to procure processed wafers to be used in a 3DS-IC process
C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0699 - Superseded Other inert gases will haveThe purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results. The scope of this Document is a grade of xylene used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o , m , and p isomers) 99. 0% min and Ethyl benzene
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