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SEMI 3D3-1123 (technical revision)
SEMI E78-0222 (technical revision)
This Specification covers two groups of substrate requirements for monocrystalline high-purity gallium arsenide wafers used in semiconductor and electronic device manufacture
SEMI G28 — Specification for Leadframes for Plastic Molded S
M02400 - SEMI M24 - 鏡面単結晶プレミアムシリコンウェーハの仕様 StdTpc-XML SEMI 3D3-1123 (technical revision)global Silicon Wafer Committee20061121global Audits and Reviews Subcommittee20072www. semi. org20073CD ROM1994200511 150300 mm Referenced SEMI Standards SEMI M1 Specifications for Polished Mono crystalline Silicon Wafers SEMI M18 Guide for Developing Specification Forms for Order Entry of Silicon Wafers SEMI M45 Provisional Specification for 300 mm Wafer Shipping System SEMI M59 Terminology for Silicon Technology
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