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Products which meet all of the requirements may be described as ‘meeting SEMI Specifications
SEMI G2-82 (technical revision)
SEMI MF42-0316 (Reapproved 0921)
3-0600 (Withdrawn 0811) — Specification for Rectangular Polished Monocrystalline Indium Phosphide Wafers
PV10200 - SEMI PV102 - Guide for Tube PECVD Graphite Boat Materials for Solar Cell Production Revision:SEMI PV102-0125 - Current Products which meet all of1 Purpose 1. 1 This Standard develops material guidelines for tube plasma enhanced chemical vapor deposition (PECVD) graphite boats, providing guidance and material performance testing for material manufacturers, processing manufacturers, and battery cell manufacturers. The high reliability of graphite boats is the goal to meet the needs of tubular PECVD process. 2 Scope 2. 1 This Standard provides recommendations for various property values and
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