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SEMI S2-0818Ea (delayed revision)
SEMI M57-0704 (first published)
The scope of this Standard is to provide concepts
It includes suggestions for layout and selection as well as application of appropriate methods and equipment for abating emissions
G08500 - SEMI G85 - マップデータ・フォーマット用仕様 Revision:SEMI G85-1101 - Superseded SEMI S2-0818Ea (delayed revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Automated Test Equipment CommitteeNorth American Automated Test Equipment Committee20033122003411North American Regional Standards Committee20035www. semi. org2003720011120033 Referenced SEMI Standards SEMI G81 Specification