M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications StdTpc-Sensor Actuator Network 本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。

本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。

and other similar packaging substrates

the testing parameters should be agreed upon by the manufacturer and the user

SEMI E80-0299 (Reapproved 1104)

M04700 - SEMI M47 - Specification for Silicon-on-Insulator (SOI) Wafers for CMOS LSI Applications StdTpc-Sensor Actuator Network 本文書の目的は，トランス1，2ジクロロエチレンに対して要求が認められたグレードのガイドラインを示す。This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. Initially available at www. semi. org in October 2010. Originally published November 2001; previously published July 2007. NOTICE: This document was balloted and approved for withdrawal in 2010. This specification defines thin layer silicon on insulator (SOI) wafer