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This Document does not include the definition of the treatment of Multiple Stage
and equipment and process development activities
本スタンダードは，the Metrics Global Technical Committeeで技術的に承認されている。現版は2012年12月20日，global Audits and Reviews Subcommitteeにて発行が承認された。2013年3月にwww
4 This Guide reviews conditions and limitations for specific water reuse applications
F08900 - SEMI F89 - 1.5インチタイプサーフェスマウント型ガス供給システム用コンパクトサイズマスフローコントローラ／マスフローメータの寸法のための仕様 Revision:SEMI F89-1012 - Inactive This Document does not includeglobal Gases Technical Committee2012830global Audits and Reviews Subcommittee201210www. semiviews. org www. semi. org2004320123 1. 5 308 kPa (44. 7 psia)50 slm20 C 3445 kPa (500 psia) Referenced SEMI Standards SEMI E49. 8 Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment SEMI F20 Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in