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E16900 - SEMI E169 - Guide for Equipment Information System Security StdPbc-0823 Such variations shall be clarified

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Such variations shall be clarified in the purchasing order or in the contract

This Standard also provides a guide for a grade of nitric acid for which a need has been identified

SEMI E130-1103 (first published)

A partial number of commonly used units and their symbols are also provided

E16900 - SEMI E169 - Guide for Equipment Information System Security StdPbc-0823 Such variations shall be clarifiedThe purpose of this Standard is to establish a common basis for equipment information system security. This can be shared among users and suppliers of semiconductor manufacturing equipment, suggesting concepts, and measures of information security. This Standard is expected to: Provide guidelines of applying appropriate security measures for equipment to optimize cost, delivery, and reliability. Make the design of user security systems easier and more

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