E03001 - SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) Lang-Korean particles of the size of

particles of the size of 5 to 10 nm range or low PPQ levels of metals) cannot currently be effectively measured in UPW

注意:　本文書は，編集上の修正を伴い再承認された。

SEMI E35-0200 (technical revision)

SEMI D22 — Test Method for the Determination of Color

E03001 - SEMI E30.1 - Specification for Inspection and Review Specific Equipment Model (ISEM) Lang-Korean particles of the size ofThis Standard establishes a Specific Equipment Model (SEM) for Inspection and Review Equipment (ISEM). The model consists of equipment characteristics and behavior that are to be implemented in addition to the SEMI E30 fundamental requirements and additional capabilities. The intent of this Standard is to facilitate the integration of ISEM equipment into an automated (semiconductor fabrication) factory. This Document accomplishes this by defining an