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measured through the center point and an effective sheet resistance at least 1
This will facilitate comparison of test results among worldwide laboratories used for monitoring or qualifying PV polysilicon and other PV silicon materials
and material acceptance purposes
SEMI MF1048-1111 (technical revision)
E08400 - SEMI E84 - 캐리어 핸드오프 병렬 I/O 인터페이스 강화 사양 Lang-Chinese (Traditional) measured through the center pointGlobal Physical Interfaces & Carriers Committee , 2009 9 4 Global Audits and Reviews Subcommittee . 1999 6 , 2007 11 . 2009 10 www. semi. org . , FOUP (open cassettes) (carrier) (AMHS) . AMHS (PI O) (control) (carrier) (handoff) ( ) . (carrier) SEMI E23 I O . (handoff), (handoff) , . (, AGV, RGV OHT AMHS ) (, ; ) (handoff) , (interbay) AMHS (, OHS ) (, OHS ) . AMHS (handoff) (carrier) I O . Figure 1 2 AHMS . (carrier) (handoff) I O : ( 6. 1) (carrier)