P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy Revision:SEMI P14-0997 - Inactive The work includes characterizing spectral

The work includes characterizing spectral and angular effects

polyvinylidene fluoride (PVDF)

この手順は，サーマルマスフローコントローラに適用される。供給される質量流量の変化を，基準定常供給電圧からの偏移の関数として測定することを意図している。試験方法は，DC電源で動作するMFCを対象に設計されている。供給電圧の影響には，DC電源の電圧降下と過電圧変動が含まれる。

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P01400 - SEMI P14 - Determination of Tin in Positive Photoresists by Graphite Furnace Atomic Absorption Spectroscopy Revision:SEMI P14-0997 - Inactive The work includes characterizing spectralNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This procedure is a graphite furnace atomic absorption analytical method for tin in photoresist. The applicable concentration range is 0. 1 to 1 ppm when the sample is diluted one to ten. The precision was found to be