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no reference sample with a low carbon content is necessary
SEMI E125-1104 (technical revision)
and some are additionally capable of measuring surface nanotopography
SEMI E99-1000E (editorial revision)
MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdPbc-1017 no reference sample with aThis standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI