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This Safety Guideline includes safety considerations in addition to those of safety standards for industrial robots
careful process and quality control of the wafer waviness during CSW and device manufacturing requires continuous monitoring of waviness by the supplier as well as by the user of CSW
WIP搬送のインタフェース，あるいは，AGVのような当面の個別設計ビークルとのインタフェース，に有効である。このスタンダードに採用した寸法は，カセット搬送同様，枚葉搬送の場合にも適用する。
A00400 - SEMI A4 - Specification for the Automated Test Equipment Tester Event Messaging for Semiconductors (TEMS) Revision:SEMI A4-0821 - Current If a particular item isNOTICE: The designation of SEMI A4 was updated during the 0821 publishing cycle to reflect the publication of SEMI A4. 1. 1 Purpose 1. 1 Semiconductor test operations involving automated test equipment (ATE) today are experiencing increasing use of data for real time data analysis and real time ATE input and control, to improve test yield, throughput, efficiency, and product quality. At the same time, test equipment and test operations around the