C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 Revision:SEMI C3.55-1011 - Superseded SEMI E40-0705E (editorial revision)

SEMI E40-0705E (editorial revision)

These parameters which are verified by series of experiments and tests on the production lines are valuable references for horizontal diffusion furnace equipment manufacturers

but may also be useful in other applications

This is a guide for implementing equipment communication features for successful integration and automation in a flat panel display manufacturing facility

C00355 - SEMI C3.55 - シラン（SiH4），バルク，品質99.994%の仕様 Revision:SEMI C3.55-1011 - Superseded SEMI E40-0705E (editorial revision)global Gases Committee2011912global Audits and Reviews Subcommittee201110www. semiviews. org www. semi. org20002 (SiH4) Referenced SEMI Standards None.