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Sheet resistance is a primary quantity for characterization
本仕様の2番目の重点項目は，半導体プロセス装置の構成に用いられるサブシステムおよびコンポーネントであり，以下のものを含むがこれらに限定されない。
between a process cassette or quartz boat and the floor of a process chamber
Data objects of the equipment operation
G09400 - SEMI G94 - 300mmウェーハ用コインスタック型テープフレーム出荷容器の仕様 StdTpc-Jig ID Sheet resistance is a primaryNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Assembly & Packaging Global Technical Committee20121220global Audits and Reviews Subcommittee20131www. semiviews. org www. semi. org 300mm 5. 1. 1 (SEMI G74) (SEMI G87) 13 Referenced SEMI Standards SEMI G59 Test Method for Measurement
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