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E02300 - SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface Revision:SEMI E23-1104 (Reapproved 0710) - Inactive 5 The purpose of this

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Description

5  The purpose of this technical guide is to make the best practice recommendations regarding materials used in the construction of internal feeders

This standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at common mechanical interfaces

SEMI C93-0522E (editorial change)

angle-resolved light scatterometers (ARLS)

E02300 - SEMI E23 - Specification for Cassette Transfer Parallel I/O Interface Revision:SEMI E23-1104 (Reapproved 0710) - Inactive 5 The purpose of thisNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Cassette transfer between process equipment and transport equipment is performed by means of a mechanical operation in the interactive area and requires quick response and reliable interlock signals. The purpose of this

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