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E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded • Type of an equipment

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Description

• Type of an equipment under test (EUT) liquid-borne particle counter

6  This Guide also provides a measurement procedure for local bow

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E16400 - SEMI E164 - Specification for EDA Common Metadata Revision:SEMI E164-0313E - Superseded • Type of an equipmentThe purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor

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