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SEMI C20-0213 (technical revision)
This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network standard suite and the PROFIBUS standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment
本スタンダードでは，各用語について定義し，それを解釈することで，
Methods of measurements suitable for determining the characteristics in this Specification are indicated
S01900 - SEMI S19 - 製造装置の設置，保守，サービス要員のトレーニングのための安全ガイドライン Revision:SEMI S19-1102 - Superseded SEMI C20-0213 (technical revision)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI global Environmental Health & Safety Committee201123global Audits and Reviews Subcommittee20113www. semiviews. org www. semi. org200211 EHS EHS EHS Referenced SEMI Standards None.